MEMS-tunable dielectric metasurface lens

Abstract

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Full text

Its licence does not allow us to show the full text. Read it at PubMed Central:

References 70

1. 1.

   Jeong KH, Liu GL, Chronis N, Lee LP. Tunable microdoublet lens array. Opt. Express. 2004;12:2494-2500.

   Not in our library10.1364/opex.12.002494

2. 2.

   Lee SW, Lee SS. Focal tunable liquid lens integrated with an electromagnetic actuator. Appl. Phys. Lett. 2007;90:121129.

   Not in our library10.1063/1.2716213

3. 3.

   Sato S. Liquid-crystal lens-cells with variable focal length. Jpn. J. Appl. Phys. 1979;18:1679-1684.

   Not in our library10.1143/jjap.18.1679

4. 4.

   Ren H, Fan YH, Gauza S, Wu ST. Tunable-focus flat liquid crystal spherical lens. Appl. Phys. Lett. 2004;84:4789-4791.

   Not in our library10.1063/1.1760226

5. 5.

   Pishnyak O, Sato S, Lavrentovich OD. Electrically tunable lens based on a dual-frequency nematic liquid crystal. Appl. Opt. 2006;45:4576-4582.

   Not in our library10.1364/ao.45.004576

6. 6.

   Kwon, S. & Lee, L. P. Stacked two dimensional micro-lens scanner for micro confocal imaging array. In Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 483–486 (IEEE, Las Vegas, NV, USA, 2002).

   Not in our library

7. 7.

   Kwon S, Milanovic V, Lee LP. Large-displacement vertical microlens scanner with low driving voltage. IEEE Photon. Technol. Lett. 2002;14:1572-1574.

   Not in our library10.1109/lpt.2002.803331

8. 8.

   Baranski M, et al. Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems. Appl. Opt. 2015;54:6924-6934.

   Not in our library10.1364/ao.54.006924

9. 9.

   Krogmann F, Mönch W, Zappe H. A MEMS-based variable micro-lens system. J. Opt. A Pure Appl. Opt. 2006;8:S330-S336.

   Not in our library10.1088/1464-4258/8/7/s06

10. 10.

    Li L, Wang D, Liu C, Wang QH. Zoom microscope objective using electrowetting lenses. Opt. Express. 2016;24:2931-2940.

    Not in our library10.1364/oe.24.002931

11. 11.

    Lee SY, Tung HW, Chen WC, Fang W. Thermal actuated solid tunable lens. IEEE Photon. Technol. Lett. 2006;18:2191-2193.

    Not in our library10.1109/lpt.2006.883891

12. 12.

    Shian S, Diebold RM, Clarke DR. Tunable lenses using transparent dielectric elastomer actuators. Opt. Express. 2013;21:8669-8676.

    Not in our library10.1364/oe.21.008669

13. 13.

    Zou Y, Zhang W, Chau FS, Zhou G. Miniature adjustable-focus endoscope with a solid electrically tunable lens. Opt. Express. 2015;23:20582-20592.

    Not in our library10.1364/oe.23.020582

14. 14.

    Zhan A, Colburn S, Dodson CM, Majumdar A. Metasurface freeform nanophotonics. Sci. Rep. 2017;7:1673.

    Not in our library10.1038/s41598-017-01908-9

15. 15.

    Kamali SM, Arbabi E, Arbabi A, Horie Y, Faraon A. Highly tunable elastic dielectric metasurface lenses. Laser Photon. Rev. 2016;10:1062-1062.

    Not in our library10.1002/lpor.201670067

16. 16.

    Ee HS, Agarwal R. Tunable metasurface and flat optical zoom lens on a stretchable substrate. Nano Lett. 2016;16:2818-2823.

    Not in our library10.1021/acs.nanolett.6b00618

17. 17.

    Sherrott MC, et al. Experimental demonstration of >230° phase modulation in gate-tunable graphene-gold reconfigurable mid-infrared metasurfaces. Nano Lett. 2017;17:3027-3034.

    Not in our library10.1021/acs.nanolett.7b00359

18. 18.

    Colburn S, Zhan A, Majumdar A. Tunable metasurfaces via subwavelength phase shifters with uniform amplitude. Sci. Rep. 2017;7:40174.

    Not in our library10.1038/srep40174

19. 19.

    She, A., Zhang, S., Shian, S., Clarke, D. R. & Capasso, F. Large area electrically tunable lenses based on metasurfaces and dielectric elastomer actuators. Preprint at https://arxiv.org/abs/1708.01972 (2017).

    Not in our library

20. 20.

    Horie, Y., Arbabi, A., Arbabi, E., Kamali, S. M. & Faraon, A. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas. ACS Photonics10.1021/acsphotonics.7b01073 (2017).

    Not in our library

21. 21.

    Staude I, Schilling J. Metamaterial-inspired silicon nanophotonics. Nat. Photon. 2017;11:274-284.

    Not in our library10.1038/nphoton.2017.39

22. 22.

    Hsiao HH, Chu CH, Tsai DP. Fundamentals and applications of metasurfaces. Small Methods. 2017;1:1600064.

    Not in our library10.1002/smtd.201600064

23. 23.

    Lalanne P, Astilean S, Chavel P, Cambril E, Launois H. Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings. Opt. Lett. 1998;23:1081-1083.

    Not in our library10.1364/ol.23.001081

24. 24.

    Fattal D, Li J, Peng Z, Fiorentino M, Beausoleil RG. Flat dielectric grating reflectors with focusing abilities. Nat. Photon. 2010;4:466-470.

    Not in our library10.1038/nphoton.2010.116

25. 25.

    Lu F, Sedgwick FG, Karagodsky V, Chase C, Chang-Hasnain CJ. Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings. Opt. Express. 2010;18:12606-12614.

    Not in our library10.1364/oe.18.012606

26. 26.

    Vo S, et al. Sub-wavelength grating lenses with a twist. IEEE Photon. Technol. Lett. 2014;26:1375-1378.

    Not in our library10.1109/lpt.2014.2325947

27. 27.

    Arbabi A, Horie Y, Ball AJ, Bagheri M, Faraon A. Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat. Commun. 2015;6:7069.

    Not in our library10.1038/ncomms8069

28. 28.

    Lin D, Fan P, Hasman E, Brongersma ML. Dielectric gradient metasurface optical elements. Science. 2014;345:298-302.

    Not in our library10.1126/science.1253213

29. 29.

    Ren Y, et al. Orbital angular momentum-based space division multiplexing for high-capacity underwater optical communications. Sci. Rep. 2016;6:33306.

    Not in our library10.1038/srep33306

30. 30.

    Zhan A, et al. Low-contrast dielectric metasurface optics. ACS Photonics. 2016;3:209-214.

    Not in our library10.1021/acsphotonics.5b00660

31. 31.

    Khorasaninejad M, et al. Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging. Science. 2016;352:1190-1194.

    Not in our library10.1126/science.aaf6644

32. 32.

    Wang L, et al. Grayscale transparent metasurface holograms. Optica. 2016;3:1504-1505.

    Not in our library10.1364/optica.3.001504

33. 33.

    Paniagua-Dominguez, R. et al. A metalens with near-unity numerical aperture. Preprint at https://arxiv.org/abs/1705.00895 (2017).

    Not in our library10.1021/acs.nanolett.8b00368

34. 34.

    Jang, M. et al. Wavefront shaping with disorder-engineered metasurfaces. Nat. Photon. 12, 84–90 (2018).

    Not in our library10.1038/s41566-017-0078-z

35. 35.

    Sell D, Yang J, Doshay S, Yang R, Fan JA. Large-angle, multifunctional metagratings based on freeform multimode geometries. Nano Lett. 2017;17:3752-3757.

    Not in our library10.1021/acs.nanolett.7b01082

36. 36.

    Zhou Z, et al. Efficient silicon metasurfaces for visible light. ACS Photonics. 2017;4:544-551.

    Not in our library10.1021/acsphotonics.6b00740

37. 37.

    Kamali SM, et al. Angle-multiplexed metasurfaces: Encoding independent wavefronts in a single metasurface under different illumination angles. Phys. Rev. X. 2017;7:041056.

    Not in our library

38. 38.

    Backlund MP, et al. Removing orientation-induced localization biases in single-molecule microscopy using a broadband metasurface mask. Nat. Photon. 2016;10:459-462.

    Not in our library10.1038/nphoton.2016.93

39. 39.
    Invited Article: Broadband highly efficient dielectric metadevices for polarization control · 2016

    Not checked
40. 40.

    Arbabi A, Horie Y, Bagheri M, Faraon A. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat. Nanotechnol. 2015;10:937-943.

    Not in our library10.1038/nnano.2015.186

Cited by papers we hold 4

• Dielectric metalens for miniaturized imaging systems: progress and challenges · 2022
  Corrected
• Quasi‐Static and Time‐Modulated Optical Phased Arrays: Beamforming Analysis and Comparative Study · 2021
  Not checked
• Reconfigurable all-dielectric metalens with diffraction-limited performance · 2021
  No notice
• A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures · 2019
  No notice

Reads

A person counts once a day per paper. We keep no cookie and no address: a reader is a hash that changes every day. Any month under five reads shows no number.