MEMS-tunable dielectric metasurface lens

Abstract

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Full text

Its licence does not allow us to show the full text. Read it at PubMed Central:

References 70

1. 1.

   Jeong KH, Liu GL, Chronis N, Lee LP. Tunable microdoublet lens array. Opt. Express. 2004;12:2494-2500.

   Not in our library10.1364/opex.12.002494 (opens in a new tab)

2. 2.

   Lee SW, Lee SS. Focal tunable liquid lens integrated with an electromagnetic actuator. Appl. Phys. Lett. 2007;90:121129.

   Not in our library10.1063/1.2716213 (opens in a new tab)

3. 3.

   Sato S. Liquid-crystal lens-cells with variable focal length. Jpn. J. Appl. Phys. 1979;18:1679-1684.

   Not in our library10.1143/jjap.18.1679 (opens in a new tab)

4. 4.

   Ren H, Fan YH, Gauza S, Wu ST. Tunable-focus flat liquid crystal spherical lens. Appl. Phys. Lett. 2004;84:4789-4791.

   Not in our library10.1063/1.1760226 (opens in a new tab)

5. 5.

   Pishnyak O, Sato S, Lavrentovich OD. Electrically tunable lens based on a dual-frequency nematic liquid crystal. Appl. Opt. 2006;45:4576-4582.

   Not in our library10.1364/ao.45.004576 (opens in a new tab)

6. 6.

   Kwon, S. & Lee, L. P. Stacked two dimensional micro-lens scanner for micro confocal imaging array. In Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 483–486 (IEEE, Las Vegas, NV, USA, 2002).

   Not in our library

7. 7.

   Kwon S, Milanovic V, Lee LP. Large-displacement vertical microlens scanner with low driving voltage. IEEE Photon. Technol. Lett. 2002;14:1572-1574.

   Not in our library10.1109/lpt.2002.803331 (opens in a new tab)

8. 8.

   Baranski M, et al. Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems. Appl. Opt. 2015;54:6924-6934.

   Not in our library10.1364/ao.54.006924 (opens in a new tab)

9. 9.

   Krogmann F, Mönch W, Zappe H. A MEMS-based variable micro-lens system. J. Opt. A Pure Appl. Opt. 2006;8:S330-S336.

   Not in our library10.1088/1464-4258/8/7/s06 (opens in a new tab)

10. 10.

    Li L, Wang D, Liu C, Wang QH. Zoom microscope objective using electrowetting lenses. Opt. Express. 2016;24:2931-2940.

    Not in our library10.1364/oe.24.002931 (opens in a new tab)

11. 11.

    Lee SY, Tung HW, Chen WC, Fang W. Thermal actuated solid tunable lens. IEEE Photon. Technol. Lett. 2006;18:2191-2193.

    Not in our library10.1109/lpt.2006.883891 (opens in a new tab)

12. 12.

    Shian S, Diebold RM, Clarke DR. Tunable lenses using transparent dielectric elastomer actuators. Opt. Express. 2013;21:8669-8676.

    Not in our library10.1364/oe.21.008669 (opens in a new tab)

13. 13.

    Zou Y, Zhang W, Chau FS, Zhou G. Miniature adjustable-focus endoscope with a solid electrically tunable lens. Opt. Express. 2015;23:20582-20592.

    Not in our library10.1364/oe.23.020582 (opens in a new tab)

14. 14.

    Zhan A, Colburn S, Dodson CM, Majumdar A. Metasurface freeform nanophotonics. Sci. Rep. 2017;7:1673.

    Not in our library10.1038/s41598-017-01908-9 (opens in a new tab)

15. 15.

    Kamali SM, Arbabi E, Arbabi A, Horie Y, Faraon A. Highly tunable elastic dielectric metasurface lenses. Laser Photon. Rev. 2016;10:1062-1062.

    Not in our library10.1002/lpor.201670067 (opens in a new tab)

16. 16.

    Ee HS, Agarwal R. Tunable metasurface and flat optical zoom lens on a stretchable substrate. Nano Lett. 2016;16:2818-2823.

    Not in our library10.1021/acs.nanolett.6b00618 (opens in a new tab)

17. 17.

    Sherrott MC, et al. Experimental demonstration of >230° phase modulation in gate-tunable graphene-gold reconfigurable mid-infrared metasurfaces. Nano Lett. 2017;17:3027-3034.

    Not in our library10.1021/acs.nanolett.7b00359 (opens in a new tab)

18. 18.

    Colburn S, Zhan A, Majumdar A. Tunable metasurfaces via subwavelength phase shifters with uniform amplitude. Sci. Rep. 2017;7:40174.

    Not in our library10.1038/srep40174 (opens in a new tab)

19. 19.

    She, A., Zhang, S., Shian, S., Clarke, D. R. & Capasso, F. Large area electrically tunable lenses based on metasurfaces and dielectric elastomer actuators. Preprint at https://arxiv.org/abs/1708.01972 (2017).

    Not in our library

20. 20.

    Horie, Y., Arbabi, A., Arbabi, E., Kamali, S. M. & Faraon, A. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas. ACS Photonics10.1021/acsphotonics.7b01073 (2017).

    Not in our library

21. 21.

    Staude I, Schilling J. Metamaterial-inspired silicon nanophotonics. Nat. Photon. 2017;11:274-284.

    Not in our library10.1038/nphoton.2017.39 (opens in a new tab)

22. 22.

    Hsiao HH, Chu CH, Tsai DP. Fundamentals and applications of metasurfaces. Small Methods. 2017;1:1600064.

    Not in our library10.1002/smtd.201600064 (opens in a new tab)

23. 23.

    Lalanne P, Astilean S, Chavel P, Cambril E, Launois H. Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings. Opt. Lett. 1998;23:1081-1083.

    Not in our library10.1364/ol.23.001081 (opens in a new tab)

24. 24.

    Fattal D, Li J, Peng Z, Fiorentino M, Beausoleil RG. Flat dielectric grating reflectors with focusing abilities. Nat. Photon. 2010;4:466-470.

    Not in our library10.1038/nphoton.2010.116 (opens in a new tab)

25. 25.

    Lu F, Sedgwick FG, Karagodsky V, Chase C, Chang-Hasnain CJ. Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings. Opt. Express. 2010;18:12606-12614.

    Not in our library10.1364/oe.18.012606 (opens in a new tab)

26. 26.

    Vo S, et al. Sub-wavelength grating lenses with a twist. IEEE Photon. Technol. Lett. 2014;26:1375-1378.

    Not in our library10.1109/lpt.2014.2325947 (opens in a new tab)

27. 27.

    Arbabi A, Horie Y, Ball AJ, Bagheri M, Faraon A. Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat. Commun. 2015;6:7069.

    Not in our library10.1038/ncomms8069 (opens in a new tab)

28. 28.

    Lin D, Fan P, Hasman E, Brongersma ML. Dielectric gradient metasurface optical elements. Science. 2014;345:298-302.

    Not in our library10.1126/science.1253213 (opens in a new tab)

29. 29.

    Ren Y, et al. Orbital angular momentum-based space division multiplexing for high-capacity underwater optical communications. Sci. Rep. 2016;6:33306.

    Not in our library10.1038/srep33306 (opens in a new tab)

30. 30.

    Zhan A, et al. Low-contrast dielectric metasurface optics. ACS Photonics. 2016;3:209-214.

    Not in our library10.1021/acsphotonics.5b00660 (opens in a new tab)

31. 31.

    Khorasaninejad M, et al. Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging. Science. 2016;352:1190-1194.

    Not in our library10.1126/science.aaf6644 (opens in a new tab)

32. 32.

    Wang L, et al. Grayscale transparent metasurface holograms. Optica. 2016;3:1504-1505.

    Not in our library10.1364/optica.3.001504 (opens in a new tab)

33. 33.

    Paniagua-Dominguez, R. et al. A metalens with near-unity numerical aperture. Preprint at https://arxiv.org/abs/1705.00895 (2017).

    Not in our library10.1021/acs.nanolett.8b00368 (opens in a new tab)

34. 34.

    Jang, M. et al. Wavefront shaping with disorder-engineered metasurfaces. Nat. Photon. 12, 84–90 (2018).

    Not in our library10.1038/s41566-017-0078-z (opens in a new tab)

35. 35.

    Sell D, Yang J, Doshay S, Yang R, Fan JA. Large-angle, multifunctional metagratings based on freeform multimode geometries. Nano Lett. 2017;17:3752-3757.

    Not in our library10.1021/acs.nanolett.7b01082 (opens in a new tab)

36. 36.

    Zhou Z, et al. Efficient silicon metasurfaces for visible light. ACS Photonics. 2017;4:544-551.

    Not in our library10.1021/acsphotonics.6b00740 (opens in a new tab)

37. 37.

    Kamali SM, et al. Angle-multiplexed metasurfaces: Encoding independent wavefronts in a single metasurface under different illumination angles. Phys. Rev. X. 2017;7:041056.

    Not in our library

38. 38.

    Backlund MP, et al. Removing orientation-induced localization biases in single-molecule microscopy using a broadband metasurface mask. Nat. Photon. 2016;10:459-462.

    Not in our library10.1038/nphoton.2016.93 (opens in a new tab)

39. 39.
    Invited Article: Broadband highly efficient dielectric metadevices for polarization control · 2016

    Not checked
40. 40.

    Arbabi A, Horie Y, Bagheri M, Faraon A. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat. Nanotechnol. 2015;10:937-943.

    Not in our library10.1038/nnano.2015.186 (opens in a new tab)

41. 41.

    Liu S, et al. Resonantly enhanced second-harmonic generation using III–V semiconductor all-dielectric metasurfaces. Nano Lett. 2016;16:5426-5432.

    Not in our library10.1021/acs.nanolett.6b01816 (opens in a new tab)

42. 42.

    Camacho-Morales R, et al. Nonlinear generation of vector beams from AlGaAs nanoantennas. Nano Lett. 2016;16:7191-7197.

    Not in our library10.1021/acs.nanolett.6b03525 (opens in a new tab)

43. 43.

    Makarov SV, et al. Efficient second-harmonic generation in nanocrystalline silicon nanoparticles. Nano Lett. 2017;17:3047-3053.

    Not in our library10.1021/acs.nanolett.7b00392 (opens in a new tab)

44. 44.

    Horie Y, Arbabi A, Han S, Faraon A. High resolution on-chip optical filter array based on double subwavelength grating reflectors. Opt. Express. 2015;23:29848-29854.

    Not in our library10.1364/oe.23.029848 (opens in a new tab)

45. 45.

    Horie Y, Arbabi A, Arbabi E, Kamali SM, Faraon A. Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures. Opt. Express. 2016;24:11677-11682.

    Not in our library10.1364/oe.24.011677 (opens in a new tab)

46. 46.

    Horie Y, et al. Visible wavelength color filters using dielectric subwavelength gratings for backside-illuminated CMOS image sensor technologies. Nano Lett. 2017;17:3159-3164.

    Not in our library10.1021/acs.nanolett.7b00636 (opens in a new tab)

47. 47.

    Yamada K, et al. Flat-top narrowband filters enabled by guided-mode resonance in two-level waveguides. Opt. Lett. 2017;42:4127-4130.

    Not in our library10.1364/ol.42.004127 (opens in a new tab)

48. 48.
    Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces · 2016

    Not checked
49. 49.

    Cheng J, Jafar-Zanjani S, Mosallaei H. All-dielectric ultrathin conformal metasurfaces: lensing and cloaking applications at 532 nm wavelength. Sci. Rep. 2016;6:38440.

    Not in our library10.1038/srep38440 (opens in a new tab)

50. 50.
    Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations · 2016

    No notice
51. 51.

    Arbabi A, Arbabi E, Horie Y, Kamali SM, Faraon A. Planar metasurface retroreflector. Nat. Photon. 2017;11:415-420.

    Not in our library10.1038/nphoton.2017.96 (opens in a new tab)

52. 52.

    Huang MCY, Zhou Y, Chang-Hasnain CJ. A nanoelectromechanical tunable laser. Nat. Photon. 2008;2:180-184.

    Not in our library10.1038/nphoton.2008.3 (opens in a new tab)

53. 53.

    Wang Y, Stellinga D, Klemm AB, Reardon CP, Krauss TF. Tunable optical filters based on silicon nitride high contrast gratings. IEEE J. Sel. Top. Quantum Electron. 2015;21:108-113.

    Not in our library10.1109/jstqe.2014.2377656 (opens in a new tab)

54. 54.

    Yoo BW, et al. A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors. Opt. Express. 2014;22:19029-19039.

    Not in our library10.1364/oe.22.019029 (opens in a new tab)

55. 55.

    Fan, L., Wu, M. C., Choquette, K. D. & Crawford, M. H. Self-assembled microactuated XYZ stages for optical scanning and alignment. In International Conference on Solid State Sensors and Actuators, vol. 1, 319–322 (IEEE, Chicago, IL, USA, 1997).

    Not in our library

56. 56.

    Arbabi E, Arbabi A, Kamali SM, Horie Y, Faraon A. High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms. Opt. Express. 2016;24:18468-18477.

    Not in our library10.1364/oe.24.018468 (opens in a new tab)

57. 57.

    Arbabi, A. et al. Increasing efficiency of high-NA metasurface lenses. In SPIE Photon. West, vol. 10113, 101130K–101131K (SPIE, San Francisco, CA, USA, 2017).

    Not in our library

58. 58.

    Kaajakari, V. PracticalMEMS (Small Gear Publishing, Las Vegas, NV, USA, 2009).

    Not in our library

59. 59.

    Serra E, et al. Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications. AIP Adv. 2016;6:065004.

    Not in our library10.1063/1.4953805 (opens in a new tab)

60. 60.

    Moura JP, Norte RA, Schäfermeier C, Gröblacher S. Centimeter-scale suspended photonic crystal mirrors. Opt. Express. 2016;26:1895-1909.

    Not in our library10.1364/oe.26.001895 (opens in a new tab)

61. 61.

    O’Shea, D. C., Suleski, T. J., Kathman, A. D. & Prather, D. W. Diffractive Optics: Design, Fabrication, and Test (SPIE Press, Bellingham, WA, USA, 2004).

    Not in our library

62. 62.

    Faklis D, Morris GM. Spectral properties of multiorder diffractive lenses. Appl. Opt. 1995;34:2462-2468.

    Not in our library10.1364/ao.34.002462 (opens in a new tab)

63. 63.

    Arbabi E, Arbabi A, Kamali SM, Horie Y, Faraon A. Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules. Optica. 2016;3:628-633.

    Not in our library10.1364/optica.3.000628 (opens in a new tab)

64. 64.

    Aieta F, Kats MA, Genevet P, Capasso F. Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science. 2015;347:1342-1345.

    Not in our library10.1126/science.aaa2494 (opens in a new tab)

65. 65.

    Arbabi E, Arbabi A, Kamali SM, Horie Y, Faraon A. Multiwavelength metasurfaces through spatial multiplexing. Sci. Rep. 2016;6:32803.

    Not in our library10.1038/srep32803 (opens in a new tab)

66. 66.

    Lin D, et al. Photonic multitasking interleaved Si nanoantenna phased array. Nano Lett. 2016;16:7671-7676.

    Not in our library10.1021/acs.nanolett.6b03505 (opens in a new tab)

67. 67.

    Arbabi, E., Arbabi, A., Kamali, S. M., Horie, Y. & Faraon, A. Dispersionless metasurfaces using dispersive meta-atoms. In Conference on Lasers and Electro-Optics (CLEO), FM2D.4 (IEEE, San Jose, CA, USA, 2016).

    Not in our library

68. 68.

    Arbabi E, Arbabi A, Kamali SM, Horie Y, Faraon A. Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces. Optica. 2017;4:625-632.

    Not in our library10.1364/optica.4.000625 (opens in a new tab)

69. 69.
    Broadband achromatic optical metasurface devices · 2017

    No notice
70. 70.

    Liu V, Fan S. S4: A free electromagnetic solver for layered periodic structures. Comput. Phys. Commun. 2012;183:2233-2244.

    Not in our library10.1016/j.cpc.2012.04.026 (opens in a new tab)

Cited by papers we hold 5

• Dielectric metalens for miniaturized imaging systems: progress and challenges · 2022
  Corrected
• Quasi‐Static and Time‐Modulated Optical Phased Arrays: Beamforming Analysis and Comparative Study · 2021
  Not checked
• Electromagnetic Architectures: Structures, Properties, Functions and Their Intrinsic Relationships in Subwavelength Optics and Electromagnetics · 2021
  Not checked
• Reconfigurable all-dielectric metalens with diffraction-limited performance · 2021
  No notice
• A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures · 2019
  No notice

Questions about this paper

Reads

A person counts once a day per paper. We keep no cookie and no address: a reader is a hash that changes every day. Any month under five reads shows no number.