A Survey on Gas Sensing Technology

Abstract

Sensing technology has been widely investigated and utilized for gas detection. Due to the different applicability and inherent limitations of different gas sensing technologies, researchers have been working on different scenarios with enhanced gas sensor calibration. This paper reviews the descriptions, evaluation, comparison and recent developments in existing gas sensing technologies. A classification of sensing technologies is given, based on the variation of electrical and other properties. Detailed introduction to sensing methods based on electrical variation is discussed through further classification according to sensing materials, including metal oxide semiconductors, polymers, carbon nanotubes, and moisture absorbing materials. Methods based on other kinds of variations such as optical, calorimetric, acoustic and gas-chromatographic, are presented in a general way. Several suggestions related to future development are also discussed. Furthermore, this paper focuses on sensitivity and selectivity for performance indicators to compare different sensing technologies, analyzes the factors that influence these two indicators, and lists several corresponding improved approaches.

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     Batzill M., Diebold U. The surface and materials science of tin oxide. Prog. Surf. Sci. 2005;79:47-154.

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     Hoefer U., Böttner H., Felske A., Kühner G., Steiner K., Sulz G. Thin-film SnO2 sensor arrays controlled by variation of contact potential-A suitable tool for chemometric gas mixture analysis in the TLV range. Sens. Actuators B. 1997;44:429-433.

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     Jarmo K., Jani M., Niina H., Teemu K., Géza T., Maria S., Andrey S., Jyri-Pekka M., Heli J., Krisztián K. Gas sensors based on anodic tungsten oxide. Sens. Actuators B. 2011;153:293-300.

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     Wisitsoraat A., Tuantranont A., Comini E., Sberveglieri G. Gas sensing properties of CNT-SnO2 nanocomposite thin film prepared by E-beam evaporation. 550-553.

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     Hallil H., Chebila F., Menini P., Pons P., Aubert H. Feasibility of wireless gas detection with an FMCW RADAR interrogation of passive RF gas sensor. 759-762.

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124. 124.

     Niskanen A.J., Varpula A., Utriainen M., Natarajan G., Cameron D.C., Novikov S., Airaksinen V., Sinkkonen J., Franssila S. Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors. Sens. Actuators B. 2010;148:227-232.

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     Kwan T.N., Boussaid F., Bermak A. A CMOS single-chip gas recognition circuit for metal oxide gas sensor arrays. IEEE Trans. Circuit. Syst. I. 2011;58:1569-1580.

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     Kwon C.H., Yun D.H., Hong H., Kim S., Lee K., Lim H.Y., Yoon K.H. Multi-layered thick-film gas sensor array for selective sensing by catalytic filtering technology. Sens. Actuators B. 2000;65:327-330.

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     Portnoff M.A., Grace R.G., Guzman A.M., Runco P.D., Yannopoulos L.N. Enhancement of MOS gas sensor selectivity by ‘on-chip’ catalytic filtering.

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     Zeng W., Liu T., Wang Z., Tsukimoto S., Saito M., Ikuhara Y. Selective detection of formaldehyde gas using a Cd-Doped TiO2-SnO2 sensor. Sensors. 2009;9:9029-9038.

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     Lee D.D., Chung W.Y., Choi M.S., Baek J.M. Low-power micro gas sensor. Sens. Actuators B. 1996;33:147-150.

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     Jaegle N., Meisinger T., Bottner H., Muller G., Becker T., Braunmuhl C.B. Micromachined thin film SnO2 gas sensors in temperature-pulsed operation mode. Sens. Actuators B. 1999;57:130-134.

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     Comini E. Metal oxide nano-crystals for gas sensing. Analyt. Chim. Acta. 2005;568:28-40.

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     Gardner J.W., Bartlett P.N. Design of conducting polymer gas sensors: Modeling and experiment. Synth. Met. 1993;55:3665-3670.

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133. 133.

     Avramov I.D., Rapp M., Voigt A., Stahl U., Dirschka M. Comparative studies on polymer coated SAW and STW resonators for chemical gas sensor applications. 58-65.

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134. 134.

     Wong K.K.L., Tang Z., Sin J.K.O., Chan P.C.H., Cheung P.W., Hiraoka H. Study on selectivity enhancement of tin dioxide gas sensor using non-conducting polymer membrane. 42-45.

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135. 135.

     Thai T.T., Yang L., DeJean G.R., Tentzeris M.M. Nanotechnology enables wireless gas sensing. IEEE Microw. Mag. 2011;12:84-95.

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136. 136.

     Mehdipour A., Rosca I., Sebak A., Trueman C.W., Hoa S.V. Advanced carbon-fiber composite materials for RFID tag antenna applications. Appl. Comput. Electrom. J. 2010;25:218-229.

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137. 137.

     Seong J.K. The effect on the gas selectivity of CNT-based gas sensors by binder in SWNT/silane sol solutions. IEEE Sens. J. 2010;10:173-177.

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138. 138.

     Liu Y., Chen M., Mohebbi M., Wang M.L., Dokmeci M.R. The effect of sequence length on DNA decorated CNT gas sensors. 2156-2159.

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139. 139.

     Schedin F., Geim A.K., Morozov S.V., Hill E.W., Blake P., Katsnelson M.I., Novoselov K.S. Detection of individual gas molecules adsorbed on graphene. Nat. Mater. 2007;6:652-655.

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140. 140.

     The HITRAN Database.

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     Charlton C., Temelkuran B., Dellemann G., Mizaikoff B. Midinfrared sensors meet nanotechnology: Trace gas sensing with quantum cascade lasers inside photonic band-gap hollow waveguides. Appl. Phys. Lett. 2005;86:194102:1-194102:3.

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     Liu K., Liu T., Jiang J., Peng G., Zhang H., Jia D., Wang Y., Jing W., Zhang Y. Investigation of wavelength modulation and wavelength sweep techniques in intracavity fiber laser for gas detection. J. Light. Technol. 2011;29:15-21.

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143. 143.

     Ryu H.Y., Lee W.K., Moon H.S., Suh H.S. Tunable erbium-doped fiber ring laser for applications for infrared absorption spectroscopy. Opt. Commun. 2007;275:379-384.

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144. 144.

     Liu K., Jing W., Peng G., Zhang J., Wang Y., Liu T., Jia D., Zhang H., Zhang Y. Wavelength sweep of intracaivity fiber laser for low concentration gas detection. IEEE Photon. Technol. Lett. 2008;20:1515-1517.

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145. 145.

     Arunajatesan V., Subramaniam B., Hutchenson K.W. In situ FTIR investigations of reverse water gas shift reaction activity at supercritical conditions. Chem. Eng. Sci. 2007;62:5062-5069.

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146. 146.

     Uotila J. Comparison of infrared sources for a differential photoacoustic gas detection system. Infrared Phys. Technol. 2007;51:122-130.

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147. 147.

     Dakin J.P., Gunning M.J., Chambers P., Xin Z.J. Detection of gases by correlation spectroscopy. Sens. Actuators B. 2003;90:124-131.

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148. 148.

     e2V.

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149. 149.

     Introduction to Pellistor Gas Sensors.

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150. 150.

     Tong M., Li J., Huang Y., Dai X. Effect of electric field to catalytic sensor. 1005-1009.

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151. 151.

     Loui A., Elhadj S., Sirbuly D.J., McCall S.K., Hart B.R., Ratto T.V. An analytic model of thermal drift in piezoresistive microcantilever sensors. J. Appl. Phys. 2010;107:054508:1-054508:13.

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     Kim K.H. Performance characterization of the GC/PFPD for H2S, CH3SH, CH3SCH3, and CH3SSCH3 in air. Atmos. Environ. 2005;39:2235-2242.

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153. 153.

     van Ruth S.M. Evaluation of two gas chromatography-olfactometry methods: The detection frequency and perceived intensity method. J. Chromatogr. A. 2004;1054:33-37.

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154. 154.

     Hallewell G., Crawford G., Mcshurley D., Oxoby G., Reif R. A sonar based technique for the ratiometric determination of binary gas mixtures. Nucl. Instrum. Methods Phys. 1988;264:219-234.

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155. 155.

     Jacobson S. New developments in ultrasonic gas analysis and flowmetering. 508-516.

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156. 156.

     Sakai M., Torii S. Apparatus and Method for Measuring Gas Concentration. 2004.

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157. 157.

     Hammond R.H. Ultrasonic Measurement System with Molecular Weight Determination. 2001.

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158. 158.

     Schmerr L.W., Song S.J. Ultrasonic Nondestructive Evaluation Systems: Models and Measurements. 2007.

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159. 159.

     Petculescu A., Hall B., Fraenzle R., Phillips S., Lueptow R.M. A prototype acoustic gas sensor based on attenuation. J. Acoust. Soc. Am. 2006;120:1779-1782.

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160. 160.

     Mylvaganam S., Halstensen M., Engen H., Esbensen K. Gas density metering in ultrasonic gas flowmeters using impedance measurement and chemometrics. 435-439.

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161. 161.

     Cros D., Guillon P. Whispering gallery dielectric resonator modes for W-band devices. IEEE Trans. Microw. Theory Techn. 2002;38:1667-1674.

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162. 162.

     Frye-Mason G., Kottenstette R.J., Lewis P.R., Heller E.J., Manginell R.P., Adkins D.R., Dullock D., Martinez D., Sasaki D., Mowry C., et al. Hand-held miniature chemical analysis system (μChemLab) for detection of trace concentrations of gas phase analytes. 140-144.

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163. 163.

     Tian W.C., Pang S.W., Lu C.J., Zellers E.T. Microfabricated preconcentrator-focuser for a microscale gas chromatograph. J. Microelectromech. Syst. 2003;12:264-272.

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164. 164.

     Yeom J., Han J., Bae B., Shannon M.A., Masel R.I. Design and characterization of micropost-filled reactor to minimize pressure drop while maximizing surface-area-to-volume-ratio. 511-516.

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165. 165.

     Tang Y., Yeom J., Han J., Bae B., Masel R.I., Shannon M.A. A micro-post preconcentrator for a microscale gas chromatography system.

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166. 166.

     Yeom J., Oh I., Field C., Radadia A., Ni Z., Bae B., Han J., Masel R.I., Shannon M.A. Enhanced toxic gas detection using a MEMS preconcentrator coated with the metal organic framework absorber. 232-235.

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     Jin C.G., Kurzawski P., Hierlemann A., Zellers E.T. Evaluation of multitransducer arrays for the determination of organic vapor mixtures. Anal. Chem. 2008;80:227-236.

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     Loui A., Sirbuly D.J., Elhadj S., McCall S.K., Hart B.R., Ratto T.V. Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor. Sens. Actuators A. 2010;159:58-63.

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169. 169.

     Wang Z., Chen P., Yang X. Application of electronic nose technology in detection of combustible gas. 6848-6852.

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170. 170.

     Cane C., Gracia I., Gotz A., Fonseca L., Lora-Tamayo E., Horrillo M.C., Sayago I., Robla J.I., Rodrigo J., Gutierrez J. Detection of gases with arrays of micromachined tin oxide gas sensors. Sens. Actuators B. 2000;65:244-246.

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     Sysoev V.V., Goschnick J., Schneider T., Strelcov E., Kolmakov A. A gradient microarray electronic nose based on percolating SnO2 nanowire sensing elements. Nano Lett. 2007;7:3182-3188.

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     Kolmakov A., Klenov D.O., Lilach Y., Stemmer S., Moskovits M. Enhanced gas sensing by individual SnO2 nanowires and nanobelts functionalized with Pd catalyst particles. Nano Lett. 2005;5:667-673.

     Not in our library10.1021/nl050082v

173. 173.

     Chen J., Wang K., Zhou W. Vertically aligned ZnO nanorod arrays coated with SnO2/Noble metal nanoparticles for highly sensitive and selective gas detection. IEEE Trans. Nanotechnol. 2011;10:968-974.

     Not in our library

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• Semiconductor Gas Sensors: Materials, Technology, Design, and Application · 2020
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• Advanced Micro- and Nano-Gas Sensor Technology: A Review · 2019
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• Indium Nitrite (InN)-Based Ultrasensitive and Selective Ammonia Sensor Using an External Silicone Oil Filter for Medical Application · 2018
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• Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators · 2017
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