Editorial for the Special Issue on Piezoelectric MEMS
Ulrich Schmid, Michael Schneider
Micromachines · 2018
doi:10.3390/mi9050237 (opens in a new tab)
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Abstract
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...]
Abstract licence: CC BY
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