Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation

Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (<i>SW-PnC</i>) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the <i>SW-PnC</i> plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz.

Abstract licence: CC BY

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