Special Issue Editorial: Functional Oxide Based Thin-Film Materials
Dong-Sing Wuu
Crystals · 2020
doi:10.3390/cryst10030195 (opens in a new tab)
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Abstract
Protective oxide coatings, such as Al<sub>2</sub>O<sub>3</sub> and Y<sub>2</sub>O<sub>3</sub> coatings, are widely used in semiconductor industries because of their hardness, high wear resistance, dielectric strength, high corrosion resistance, and chemical stability for plasma chambers [...]
Abstract licence: CC BY
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