Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range
Ting-Wei Liu, Yao-Chuan Tsai, Yu-Ching Lin and 3 more
AIP Advances · 2014
doi:10.1063/1.4902018 (opens in a new tab)
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Abstract
This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated.
Abstract licence: CC BY
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